Invention Application
- Patent Title: SOLUTION TREATMENT APPARATUS AND CLEANING METHOD
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Application No.: US17485698Application Date: 2021-09-27
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Publication No.: US20220113643A1Publication Date: 2022-04-14
- Inventor: Kenta SHIBASAKI , Hiroichi INADA , Satoshi SHIMMURA , Koji TAKAYANAGI , Kenji YADA , Shinichi SEKI , Akihiro TERAMOTO
- Applicant: Tokyo Electron Limited
- Applicant Address: JP Tokyo
- Assignee: Tokyo Electron Limited
- Current Assignee: Tokyo Electron Limited
- Current Assignee Address: JP Tokyo
- Priority: JP2020-170375 20201008
- Main IPC: G03F7/20
- IPC: G03F7/20 ; B08B3/08 ; G03F7/16

Abstract:
A solution treatment apparatus for applying a coating solution onto a substrate, includes: a holder holding and rotating the substrate; a coating solution supplier supplying the coating solution to the substrate on the holder; and an inner cup surrounding the holder from a lateral side and having a peripheral edge side upper surface inclining down outward in a radial direction from an apex part located below a peripheral edge side of the substrate on the holder, wherein: the inner cup has a plurality of discharge ports formed along a circumferential direction at the apex part; and the discharge ports are formed to discharge a cleaning solution and make the cleaning solution flow down along the peripheral edge side upper surface of the inner cup, thereby cleaning the peripheral edge side upper surface, and to discharge the cleaning solution outward in the radial direction and obliquely upward.
Public/Granted literature
- US11868057B2 Solution treatment apparatus and cleaning method Public/Granted day:2024-01-09
Information query
IPC分类: