公开(公告)号：US20240085813A1

公开(公告)日：2024-03-14

申请号：US18515667

申请日：2023-11-21

Applicant: Tokyo Electron Limited

Inventor： Kenta SHIBASAKI ,  Hiroichi INADA ,  Satoshi SHIMMURA ,  Koji TAKAYANAGI ,  Kenji YADA ,  Shinichi SEKI ,  Akihiro TERAMOTO

IPC: G03F7/00 ,  B05C11/02 ,  B08B3/08 ,  G03F7/16

CPC classification number: G03F7/70925 ,  B05C11/02 ,  B08B3/08 ,  G03F7/162

Abstract: A cleaning method of cleaning a solution treatment apparatus for applying a coating solution onto a substrate, the solution treatment apparatus including a holder holding and rotating the substrate; a coating solution supplier; and an inner cup surrounding the holder from a lateral side and having a peripheral edge side upper surface inclining down outward in a radial direction. The cleaning method includes introducing the cleaning solution to the storage chamber via the introduction hole, discharging the cleaning solution from the discharge port and making the cleaning solution flow down along the peripheral edge side upper surface of the inner cup, thereby cleaning away the coating solution adhering to the peripheral edge side upper surface. The discharging in the cleaning discharges the cleaning solution from discharge ports of the inner cup outward in the radial direction and obliquely upward.

公开(公告)号：US20220113643A1

公开(公告)日：2022-04-14

申请号：US17485698

申请日：2021-09-27

Applicant: Tokyo Electron Limited

Inventor： Kenta SHIBASAKI ,  Hiroichi INADA ,  Satoshi SHIMMURA ,  Koji TAKAYANAGI ,  Kenji YADA ,  Shinichi SEKI ,  Akihiro TERAMOTO

IPC: G03F7/20 ,  B08B3/08 ,  G03F7/16

Abstract: A solution treatment apparatus for applying a coating solution onto a substrate, includes: a holder holding and rotating the substrate; a coating solution supplier supplying the coating solution to the substrate on the holder; and an inner cup surrounding the holder from a lateral side and having a peripheral edge side upper surface inclining down outward in a radial direction from an apex part located below a peripheral edge side of the substrate on the holder, wherein: the inner cup has a plurality of discharge ports formed along a circumferential direction at the apex part; and the discharge ports are formed to discharge a cleaning solution and make the cleaning solution flow down along the peripheral edge side upper surface of the inner cup, thereby cleaning the peripheral edge side upper surface, and to discharge the cleaning solution outward in the radial direction and obliquely upward.