Invention Application
- Patent Title: BULK ACOUSTIC WAVE RESONATOR
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Application No.: US17222018Application Date: 2021-04-05
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Publication No.: US20220116016A1Publication Date: 2022-04-14
- Inventor: Won HAN , Sang Uk SON , Tae Yoon KIM , Chang Hyun LIM , Sang Heon HAN , Jong Beom KIM
- Applicant: Samsung Electro-Mechanics Co., Ltd.
- Applicant Address: KR Suwon-si
- Assignee: Samsung Electro-Mechanics Co., Ltd.
- Current Assignee: Samsung Electro-Mechanics Co., Ltd.
- Current Assignee Address: KR Suwon-si
- Priority: KR10-2020-0131876 20201013
- Main IPC: H03H9/17
- IPC: H03H9/17

Abstract:
A bulk acoustic wave resonator includes a substrate, a first electrode, wherein a cavity is formed between the substrate and the first electrode, a piezoelectric layer disposed on the first electrode and overlapping at least a portion of the first electrode, a second electrode disposed on the piezoelectric layer and overlapping at least a portion of the piezoelectric layer, a passivation layer having at least a portion disposed on the second electrode and overlapping at least a portion of the second electrode, and a lower frame spaced apart from the substrate and having a portion of the cavity disposed therebetween. Any one of the second electrode and the passivation layer includes a protruding portion having a first thickness and an extended portion having a second thickness less than the first thickness, and an inner end of the lower frame and an end of the protruding portion are spaced apart horizontally.
Public/Granted literature
- US11870419B2 Bulk acoustic wave resonator Public/Granted day:2024-01-09
Information query
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