Invention Application
- Patent Title: PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
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Application No.: US17450886Application Date: 2021-10-14
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Publication No.: US20220122847A1Publication Date: 2022-04-21
- Inventor: Yuzuru SAKAI , Ryo TERASHIMA
- Applicant: Tokyo Electron Limited
- Applicant Address: JP Tokyo
- Assignee: Tokyo Electron Limited
- Current Assignee: Tokyo Electron Limited
- Current Assignee Address: JP Tokyo
- Priority: JP2020-176954 20201021
- Main IPC: H01L21/311
- IPC: H01L21/311 ; H01J37/32

Abstract:
A plasma processing apparatus includes a plurality of plasma processing chambers, a process gas supply line that supplies a plasma processing gas to the plasma processing chambers, a first additive gas supply line that supplies an additive gas to the plasma processing chambers, an exhaust space shared by the plurality of plasma processing chambers, and a controller. The controller determines a first plasma processing chamber group and a second plasma processing chamber group. The first plasma processing chamber group includes one or more plasma processing chambers, each of which performs the plasma processing and the second plasma processing chamber group includes one or more plasma processing chambers, each of which does not perform the plasma processing. The controller causes the additive gas to be supplied to the one or more plasma processing chambers of the second plasma processing chamber group from the first additive gas supply line.
Public/Granted literature
- US11817321B2 Plasma processing apparatus and plasma processing method Public/Granted day:2023-11-14
Information query
IPC分类: