Invention Application
- Patent Title: VACUUM PUMP AND VACUUM PUMP CONSTITUENT COMPONENT
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Application No.: US17440563Application Date: 2020-03-13
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Publication No.: US20220145894A1Publication Date: 2022-05-12
- Inventor: Nahoko Yoshihara , Yoshiyuki Sakaguchi , Yasushi Tateno , Yohei Ogawa
- Applicant: Edwards Japan Limited
- Applicant Address: JP Yachiyo-shi
- Assignee: Edwards Japan Limited
- Current Assignee: Edwards Japan Limited
- Current Assignee Address: JP Yachiyo-shi
- Priority: JP2019-058859 20190326
- International Application: PCT/JP2020/011072 WO 20200313
- Main IPC: F04D19/04
- IPC: F04D19/04 ; F04D29/52 ; F04D29/58

Abstract:
The present disclosure provides a vacuum pump of which a thermal resistance between a heater and a water-cooling tube is high and which has a small number of components. The vacuum pump includes: a main body casing having an intake portion and an exhaust portion of gas; a turbo-molecular pump mechanism portion in which stator blades and rotor blades are formed; and a motor for rotating the rotor blades, wherein the main body casing has a base spacer capable of thermal conduction between a heating spacer portion and a water-cooling spacer portion having been integrally molded, and the base spacer is provided with a boundary portion having been molded such that a cross section thereof assumes a narrow neck shape between the heating spacer portion and the water-cooling spacer portion.
Information query