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公开(公告)号:US12123420B2
公开(公告)日:2024-10-22
申请号:US17793128
申请日:2021-01-20
发明人: Takashi Kabasawa , Yasushi Tateno , Yohei Ogawa
CPC分类号: F04D19/042 , F04D27/001 , F04D29/083 , F05D2210/12
摘要: A vacuum pump and a stator column wherein partition walls from an outer peripheral surface of the stator column toward an inner periphery of a rotor blade are provided at two spots, and a groove-shaped channel in a circumferential direction is provided. A sectional area of the channel changes in the circumferential direction. As a result, the pressure difference between a front and a rear of the partition wall on a downstream side is made uniform regardless of a location, and a flowrate of the gas passing through a gap between the partition wall on the downstream side and the inner peripheral surface of the rotor blade is made uniform regardless of the location. The change in the sectional area is achieved either by changing a depth of the groove-shaped channel or by changing an interval between the partition walls at the two spots.
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公开(公告)号:US11933310B2
公开(公告)日:2024-03-19
申请号:US17610957
申请日:2020-05-22
CPC分类号: F04D19/042 , F04D29/403
摘要: A main-body casing having an inlet port or an outlet port, a rotatable rotor shaft, and a rotor coupled to the rotor shaft are provided. A recess portion opened toward the inlet port is formed in the rotor and a fastening portion (a first shaft portion and a second shaft portion) of the rotor shaft is exposed to the recess portion. A cover portion, which is fastened to the fastening portion by a cover-portion fixing bolt and covers at least a part of the recess portion, is formed having a container shape and has a reinforcing portion located in a periphery of the fastening portion that prevents deflection by increasing rigidity. The cover portion also has a contact-pressure generating portion which is pressed by fastening to the fastening portion in a fastening direction and causes a contact pressure to be generated in the fastening direction.
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公开(公告)号:US20220252074A1
公开(公告)日:2022-08-11
申请号:US17610957
申请日:2020-05-22
摘要: A main-body casing having an inlet port or an outlet port, a rotatable rotor shaft, and a rotor coupled to the rotor shaft are provided. A recess portion opened toward the inlet port is formed in the rotor and a fastening portion (a first shaft portion and a second shaft portion) of the rotor shaft is exposed to the recess portion. A cover portion, which is fastened to the fastening portion by a cover-portion fixing bolt and covers at least a part of the recess portion, is formed having a container shape and has a reinforcing portion located in a periphery of the fastening portion that prevents deflection by increasing rigidity. The cover portion also has a contact-pressure generating portion which is pressed by fastening to the fastening portion in a fastening direction and causes a contact pressure to be generated in the fastening direction.
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公开(公告)号:US20220145894A1
公开(公告)日:2022-05-12
申请号:US17440563
申请日:2020-03-13
摘要: The present disclosure provides a vacuum pump of which a thermal resistance between a heater and a water-cooling tube is high and which has a small number of components. The vacuum pump includes: a main body casing having an intake portion and an exhaust portion of gas; a turbo-molecular pump mechanism portion in which stator blades and rotor blades are formed; and a motor for rotating the rotor blades, wherein the main body casing has a base spacer capable of thermal conduction between a heating spacer portion and a water-cooling spacer portion having been integrally molded, and the base spacer is provided with a boundary portion having been molded such that a cross section thereof assumes a narrow neck shape between the heating spacer portion and the water-cooling spacer portion.
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公开(公告)号:US11905968B2
公开(公告)日:2024-02-20
申请号:US17439650
申请日:2020-03-13
CPC分类号: F04D29/4206 , F04D19/04
摘要: To provide a vacuum pump which separates and constructs an inlet port flange and a casing (outer cylinder) as two components to reduce weight while retaining required strength and which is consequently capable of reducing manufacturing cost. In a vacuum pump, an inlet port flange and a casing (outer cylinder) are separated from each other and constructed as different members. The inlet port flange uses stainless steel as a material thereof and the casing (outer cylinder) use aluminum as a material thereof. The components are fastened to each other by bolts and sealed by an O-ring in order to maintain a vacuum property during assembly of the vacuum pump. Accordingly, a weight of the vacuum pump can be reduced while maintaining strength of the inlet port flange.
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公开(公告)号:US20230049439A1
公开(公告)日:2023-02-16
申请号:US17793128
申请日:2021-01-20
发明人: Takashi Kabasawa , Yasushi Tateno , Yohei Ogawa
摘要: A vacuum pump and a stator column wherein partition walls from an outer peripheral surface of the stator column toward an inner periphery of a rotor blade are provided at two spots, and a groove-shaped channel in a circumferential direction is provided. A sectional area of the channel changes in the circumferential direction. As a result, the pressure difference between a front and a rear of the partition wall on a downstream side is made uniform regardless of a location, and a flowrate of the gas passing through a gap between the partition wall on the downstream side and the inner peripheral surface of the rotor blade is made uniform regardless of the location. The change in the sectional area is achieved either by changing a depth of the groove-shaped channel or by changing an interval between the partition walls at the two spots.
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公开(公告)号:US20220186743A1
公开(公告)日:2022-06-16
申请号:US17439650
申请日:2020-03-13
摘要: To provide a vacuum pump which separates and constructs an inlet port flange and a casing (outer cylinder) as two components to reduce weight while retaining required strength and which is consequently capable of reducing manufacturing cost. In a vacuum pump, an inlet port flange and a casing (outer cylinder) are separated from each other and constructed as different members. The inlet port flange uses stainless steel as a material thereof and the casing (outer cylinder) use aluminum as a material thereof. The components are fastened to each other by bolts and sealed by an O-ring in order to maintain a vacuum property during assembly of the vacuum pump. Accordingly, a weight of the vacuum pump can be reduced while maintaining strength of the inlet port flange.
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