Invention Application
- Patent Title: POLISHING SLURRY COMPOSITION FOR STI PROCESS
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Application No.: US17415703Application Date: 2019-07-11
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Publication No.: US20220177727A1Publication Date: 2022-06-09
- Inventor: Jung Yoon KIM , Jun Ha HWANG , Kwang Soo PARK , Hae Won YANG
- Applicant: KCTECH CO., LTD.
- Applicant Address: KR Gyeonggi-do
- Assignee: KCTECH CO., LTD.
- Current Assignee: KCTECH CO., LTD.
- Current Assignee Address: KR Gyeonggi-do
- Priority: KR10-2018-0166060 20181220
- International Application: PCT/KR2019/008531 WO 20190711
- Main IPC: C09G1/02
- IPC: C09G1/02

Abstract:
The present disclosure relates to a polishing slurry composition for an STI process and, more specifically, to a polishing slurry composition for an STI process, the polishing slurry composition comprising: a polishing solution including polishing particles; and an additive solution containing a polymer having an amide bond, and a polysilicon film polishing barrier inclusive of a monomer having three or more chains linked to one or more atoms.
Public/Granted literature
- US12031062B2 Polishing slurry composition for sti process Public/Granted day:2024-07-09
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