Invention Application
- Patent Title: PIEZOELECTRIC ELEMENT AND METHOD FOR MANUFACTURING THE SAME
-
Application No.: US17694729Application Date: 2022-03-15
-
Publication No.: US20220209095A1Publication Date: 2022-06-30
- Inventor: Shinsuke IKEUCHI , Masato KOBAYASHI , Masayuki SUZUKI , Fumiya KUROKAWA , Yutaka KISHIMOTO , Hajime YAMADA
- Applicant: Murata Manufacturing Co., Ltd.
- Applicant Address: JP Nagaokakyo-shi
- Assignee: Murata Manufacturing Co., Ltd.
- Current Assignee: Murata Manufacturing Co., Ltd.
- Current Assignee Address: JP Nagaokakyo-shi
- Priority: JP2019-168493 20190917
- Main IPC: H01L41/047
- IPC: H01L41/047 ; H01L41/053 ; H01L41/29 ; H01L41/312 ; H01L41/187

Abstract:
A piezoelectric element includes a piezoelectric layer, a first electrode layer, and a second electrode layer. The piezoelectric layer includes first and second surfaces opposed to each other. The first electrode layer is located on the first surface. The second electrode layer is located on the second surface. At least a portion of the second electrode layer faces the first electrode layer with the piezoelectric layer interposed therebetween. The second electrode layer mainly includes silicon. The piezoelectric layer is monocrystalline.
Information query
IPC分类: