公开(公告)号：US20230261639A1

公开(公告)日：2023-08-17

申请号：US18136373

申请日：2023-04-19

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Tetsuya KIMURA ,  Shintaro KUBO ,  Yutaka KISHIMOTO ,  Masashi OMURA ,  Hajime YAMADA

IPC: H03H9/25 ,  H03H3/02 ,  H03H9/02 ,  H03H9/145 ,  H03H9/17

CPC classification number: H03H9/25 ,  H03H3/02 ,  H03H9/02574 ,  H03H9/14541 ,  H03H9/02559 ,  H03H9/173

Abstract: An acoustic wave device includes a support substrate, a dielectric film, a piezoelectric layer, and an excitation electrode. The piezoelectric layer includes first and second main surfaces. The second main surface is on a side including the dielectric film. A cavity portion is provided in the dielectric film and overlaps at least a portion of the excitation electrode in plan view. The dielectric film includes a side wall surface facing the cavity portion and including an inclined portion inclined so that a width of the cavity portion decreases with increasing distance away from the piezoelectric layer. The inclined portion includes at least an end portion on a side including the piezoelectric layer, in the side wall surface. When an angle between the inclined portion and the second main surface of the piezoelectric layer is defined as an inclination angle α, the inclination angle α is from about 40° to about 80° inclusive.

公开(公告)号：US20220209095A1

公开(公告)日：2022-06-30

申请号：US17694729

申请日：2022-03-15

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Shinsuke IKEUCHI ,  Masato KOBAYASHI ,  Masayuki SUZUKI ,  Fumiya KUROKAWA ,  Yutaka KISHIMOTO ,  Hajime YAMADA

IPC: H01L41/047 ,  H01L41/053 ,  H01L41/29 ,  H01L41/312 ,  H01L41/187

Abstract: A piezoelectric element includes a piezoelectric layer, a first electrode layer, and a second electrode layer. The piezoelectric layer includes first and second surfaces opposed to each other. The first electrode layer is located on the first surface. The second electrode layer is located on the second surface. At least a portion of the second electrode layer faces the first electrode layer with the piezoelectric layer interposed therebetween. The second electrode layer mainly includes silicon. The piezoelectric layer is monocrystalline.

公开(公告)号：US20230361754A1

公开(公告)日：2023-11-09

申请号：US18341775

申请日：2023-06-27

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Yutaka KISHIMOTO ,  Masashi OMURA ,  Shintaro KUBO ,  Hajime YAMADA

IPC: H03H9/17 ,  H03H9/56 ,  H03H3/02 ,  H03H9/02 ,  H03H9/13

CPC classification number: H03H9/173 ,  H03H9/568 ,  H03H3/02 ,  H03H9/02157 ,  H03H9/132 ,  H03H2003/021

Abstract: An acoustic wave device that includes a piezoelectric substrate that has a piezoelectric layer and a hollow portion, and first and second electrodes and. The piezoelectric layer has a first region that overlaps the first and second electrodes and the hollow portion in plan view, a second region that does not overlap the hollow portion and surrounds the first region in plan view, and a third region that overlaps the hollow portion and is located between the first region and the second region in plan view. A portion including the border between the first region and the third region of a cross-sectional shape in a lamination direction of the piezoelectric substrate includes a curved-surface shape.

公开(公告)号：US20220199891A1

公开(公告)日：2022-06-23

申请号：US17691488

申请日：2022-03-10

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Masayuki SUZUKI ,  Shinsuke IKEUCHI ,  Fumiya KUROKAWA ,  Yutaka KISHIMOTO ,  Hajime YAMADA ,  Masato KOBAYASHI

IPC: H01L41/047 ,  H01L41/187 ,  H01L41/332 ,  H01L41/313 ,  H01L41/293 ,  H01L41/297

Abstract: A piezoelectric element includes a piezoelectric layer, a first electrode layer, a second electrode layer, and a coupling electrode. At least a portion of the second electrode layer faces the first electrode layer with the piezoelectric layer interposed therebetween. The second electrode layer includes a coupling area. The coupling area meets a through hole in a region of the second electrode layer not facing the first electrode layer. The coupling electrode is on the coupling area. Between the coupling area and the surface of the second electrode layer on the piezoelectric layer side excluding the coupling area, the difference in position is about 5 nm or less.