公开(公告)号：US20220209095A1

公开(公告)日：2022-06-30

申请号：US17694729

申请日：2022-03-15

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Shinsuke IKEUCHI ,  Masato KOBAYASHI ,  Masayuki SUZUKI ,  Fumiya KUROKAWA ,  Yutaka KISHIMOTO ,  Hajime YAMADA

IPC: H01L41/047 ,  H01L41/053 ,  H01L41/29 ,  H01L41/312 ,  H01L41/187

Abstract: A piezoelectric element includes a piezoelectric layer, a first electrode layer, and a second electrode layer. The piezoelectric layer includes first and second surfaces opposed to each other. The first electrode layer is located on the first surface. The second electrode layer is located on the second surface. At least a portion of the second electrode layer faces the first electrode layer with the piezoelectric layer interposed therebetween. The second electrode layer mainly includes silicon. The piezoelectric layer is monocrystalline.

公开(公告)号：US20220199891A1

公开(公告)日：2022-06-23

申请号：US17691488

申请日：2022-03-10

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Masayuki SUZUKI ,  Shinsuke IKEUCHI ,  Fumiya KUROKAWA ,  Yutaka KISHIMOTO ,  Hajime YAMADA ,  Masato KOBAYASHI

IPC: H01L41/047 ,  H01L41/187 ,  H01L41/332 ,  H01L41/313 ,  H01L41/293 ,  H01L41/297

Abstract: A piezoelectric element includes a piezoelectric layer, a first electrode layer, a second electrode layer, and a coupling electrode. At least a portion of the second electrode layer faces the first electrode layer with the piezoelectric layer interposed therebetween. The second electrode layer includes a coupling area. The coupling area meets a through hole in a region of the second electrode layer not facing the first electrode layer. The coupling electrode is on the coupling area. Between the coupling area and the surface of the second electrode layer on the piezoelectric layer side excluding the coupling area, the difference in position is about 5 nm or less.