Invention Application
- Patent Title: SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD OF THE SEMICONDUCTOR DEVICE
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Application No.: US17606830Application Date: 2020-04-27
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Publication No.: US20220216341A1Publication Date: 2022-07-07
- Inventor: Shunpei YAMAZAKI , Ryota HODO , Tetsuya KAKEHATA , Shinya SASAGAWA
- Applicant: SEMICONDUCTOR ENERGY LABORATORY CO., LTD.
- Applicant Address: JP Atsugi-shi, Kanagawa-ken
- Assignee: SEMICONDUCTOR ENERGY LABORATORY CO., LTD.
- Current Assignee: SEMICONDUCTOR ENERGY LABORATORY CO., LTD.
- Current Assignee Address: JP Atsugi-shi, Kanagawa-ken
- Priority: JP2019-089646 20190510
- International Application: PCT/IB2020/053912 WO 20200427
- Main IPC: H01L29/786
- IPC: H01L29/786 ; H01L29/66 ; H01L21/321 ; H01L21/311

Abstract:
A transistor with a high on-state current and a semiconductor device with high productivity are provided. Included are a first oxide, a second oxide, a third oxide, and a fourth oxide over a first insulator; a first conductor over the third oxide; a second conductor over the fourth oxide; a second insulator over the first conductor; a third insulator over the second conductor; a fifth oxide positioned over the second oxide and between the third oxide and the fourth oxide; a sixth oxide over the fifth oxide; a fourth insulator over the sixth oxide; a third conductor over the fourth insulator; and a fifth insulator over the first insulator to the third insulator. The fifth oxide includes a region in contact with the second oxide to the fourth oxide and the first insulator. The sixth oxide includes a region in contact with the fifth oxide, the first conductor, and the second conductor. The fourth insulator includes a region in contact with at least the sixth oxide, the third conductor, and the fifth insulator.
Public/Granted literature
- US12218247B2 Semiconductor device and manufacturing method of the semiconductor device Public/Granted day:2025-02-04
Information query
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