Invention Application
- Patent Title: INFORMATION PROCESSING DEVICE, RECORDING MEDIUM, AND PROCESS CONDITION SEARCH METHOD
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Application No.: US17584712Application Date: 2022-01-26
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Publication No.: US20220244685A1Publication Date: 2022-08-04
- Inventor: Yuto NODA , Shota YAMAZAKI , Yuichi TAKENAGA , Toshiyuki FUKUMOTO
- Applicant: Tokyo Electron Limited
- Applicant Address: JP Tokyo
- Assignee: Tokyo Electron Limited
- Current Assignee: Tokyo Electron Limited
- Current Assignee Address: JP Tokyo
- Priority: JP2021-016352 20210204
- Main IPC: G05B13/04
- IPC: G05B13/04 ; G05B13/02 ; G05B23/02

Abstract:
An information processing device includes: a machine learning model selection part configured to select a machine learning model appropriate for a data set used for learning of the machine learning model; a calculation part configured to perform an optimization calculation by using the selected machine learning model to calculate process conditions that can achieve a target process result, predicted values of a process result corresponding to each of the process conditions, and reliability of the predicted values; a process condition selection part configured to select, among the process conditions that can achieve the target process result, one or more process conditions according to the predicted values of the process result and the reliability of the predicted values; and a display controller configured to display the selected process conditions, the predicted values of the process result corresponding to each of the selected process conditions, and the reliability of the predicted values.
Public/Granted literature
- US12253838B2 Information processing device, recording medium, and process condition search method Public/Granted day:2025-03-18
Information query