Invention Application
- Patent Title: COMPOSITIONS FOR TUNGSTEN ETCHING INHIBITION
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Application No.: US17632816Application Date: 2020-08-04
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Publication No.: US20220267643A1Publication Date: 2022-08-25
- Inventor: Michael LAUTER , Haci Osman GUEVENC , Wei Lan CHIU , Te Yu WEI
- Applicant: BASF SE
- Applicant Address: DE Ludwigshafen am Rhein
- Assignee: BASF SE
- Current Assignee: BASF SE
- Current Assignee Address: DE Ludwigshafen am Rhein
- Priority: EP19190716.1 20190808
- International Application: PCT/EP2020/071925 WO 20200804
- Main IPC: C09G1/02
- IPC: C09G1/02 ; C23F11/14 ; C23F11/173 ; H01L21/321
Abstract:
The presently claimed invention relates to compositions and methods for inhibition of etching. The presently claimed invention particularly relates to a composition and methods for inhibition of tungsten etching.
Information query
