Invention Application
- Patent Title: AGGREGATION METHOD AND PROCESSING APPARATUS
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Application No.: US17692338Application Date: 2022-03-11
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Publication No.: US20220291035A1Publication Date: 2022-09-15
- Inventor: Takashi ASAKAWA , Satoshi TANAKA , Ryota AOI
- Applicant: Tokyo Electron Limited
- Applicant Address: JP Tokyo
- Assignee: Tokyo Electron Limited
- Current Assignee: Tokyo Electron Limited
- Current Assignee Address: JP Tokyo
- Priority: JP2021-040448 20210312
- Main IPC: G01F15/06
- IPC: G01F15/06

Abstract:
An aggregation method includes: acquiring log information including a measurement value of a force used by a processing apparatus and a measurement date and time, the measurement value being measured by a sensor of the processing apparatus that processes a substrate; storing the measurement value of the force and the measurement date and time included in the acquired log information in a storage unit; and integrating the measurement value of the force associated with the measurement date and time in a specified aggregation period with reference to the storage unit to calculate an integrated value of the force for each processing apparatus.
Information query