Invention Application
- Patent Title: Extended Cathode And Repeller Life By Active Management Of Halogen Cycle
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Application No.: US17308732Application Date: 2021-05-05
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Publication No.: US20220359147A1Publication Date: 2022-11-10
- Inventor: Graham Wright , Daniel Alvarado , Eric Donald Wilson , Robert Lindberg
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Main IPC: H01J27/08
- IPC: H01J27/08 ; H01J37/30 ; H01J27/02 ; H01J37/08

Abstract:
A system and method for extending the life of a cathode and repeller in an IHC ion source is disclosed. The system monitors the health of the cathode by operating using a known set of parameters and measuring the bias power used to generate the desired extracted beam current or the desired current from the arc voltage power supply. Based on the measured bias power, the system may determine whether the cathode is becoming too thin, and may take a corrective action. This corrective action may be to alert the operator; to operate the IHC ion source using a predetermined set of parameters; or to change the dilution used within the IHC source. By performing these actions, the life of the cathode may be more than doubled.
Public/Granted literature
- US11664183B2 Extended cathode and repeller life by active management of halogen cycle Public/Granted day:2023-05-30
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