Invention Application
- Patent Title: MULTIPLE POLISHING HEADS WITH CROSS-ZONE PRESSURE ELEMENT DISTRIBUTIONS FOR CMP
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Application No.: US17317968Application Date: 2021-05-12
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Publication No.: US20220362903A1Publication Date: 2022-11-17
- Inventor: Yung-Lung Lin , Kuo-Ming Wu , Cheng-Hsien Chou , I-Nan Chen , Sheng-Chau Chen , Cheng-Yuan Tsai
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsinchu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsinchu
- Main IPC: B24B37/14
- IPC: B24B37/14 ; B24B37/10

Abstract:
Various embodiments of the present disclosure are directed towards a chemical mechanical polishing (CMP) system including a first CMP head and a second CMP head. The first CMP head is configured to retain a workpiece and comprises a first plurality of pressure elements disposed across a first pressure control plate. The second CMP head is configured to retain the workpiece. The second CMP head comprises a second plurality of pressure elements disposed across a second pressure control plate. A distribution of the first plurality of pressure elements across the first pressure control plate is different from a distribution of the second plurality of pressure elements across the second pressure control plate.
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