Invention Application
- Patent Title: SEMICONDUCTOR MEMORY DEVICE AND MANUFACTURING METHOD THEREOF
-
Application No.: US17886164Application Date: 2022-08-11
-
Publication No.: US20220384471A1Publication Date: 2022-12-01
- Inventor: Yusuke SHIMA
- Applicant: Kioxia Corporation
- Applicant Address: JP Tokyo
- Assignee: Kioxia Corporation
- Current Assignee: Kioxia Corporation
- Current Assignee Address: JP Tokyo
- Priority: JP2019-155604 20190828
- Main IPC: H01L27/11556
- IPC: H01L27/11556 ; H01L27/11582 ; G11C5/02 ; G11C5/06 ; H01L29/04 ; H01L21/67 ; H01L21/768 ; H01L21/3105 ; H01L21/3065

Abstract:
A semiconductor memory device includes a first region where a plurality of conductive layers, a plurality of insulating layers, a semiconductor layer, and a gate insulating layer are formed and a second region different from the first region above a substrate. The plurality of conductive layers include a plurality of first conductive layers and a plurality of second conductive layers. The semiconductor memory device includes a plurality of first films different from the first conductive layers disposed in same layers as the plurality of first conductive layers in the second region and a plurality of second films different from the second conductive layers and the first films disposed in same layers as the plurality of second conductive layers in the second region.
Public/Granted literature
- US12010837B2 Semiconductor memory device and manufacturing method thereof Public/Granted day:2024-06-11
Information query
IPC分类: