Invention Application
- Patent Title: VACUUM PUMP
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Application No.: US17769560Application Date: 2020-10-27
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Publication No.: US20220397124A1Publication Date: 2022-12-15
- Inventor: Yoshiyuki Takai , Tooru Miwata
- Applicant: Edwards Japan Limited
- Applicant Address: JP Chiba
- Assignee: Edwards Japan Limited
- Current Assignee: Edwards Japan Limited
- Current Assignee Address: JP Chiba
- Priority: JP2019-200923 20191105
- International Application: PCT/JP2020/040332 WO 20201027
- Main IPC: F04D29/58
- IPC: F04D29/58 ; F04D19/04 ; F04D29/54 ; F04D29/52

Abstract:
A vacuum pump includes a rotor provided with a plurality of rotor blades and a rotor cylinder portion, a driving portion, a bearing, stator blades, a thread groove stator that is disposed downstream of the stator blades and has an inner peripheral surface facing an outer peripheral surface of the rotor cylinder portion, and a heat insulating wall disposed downstream of the thread groove. The heat insulating wall includes a ring-shaped annular portion, and a substantially cylindrical wall portion extending from an inner portion of the annular portion in the radial direction to the upstream side and forming a flow path on the outer peripheral surface side. A first corner portion is formed between an upstream-side surface of the annular portion and the outer peripheral surface of the wall portion, the first corner portion being formed in an arc shape.
Public/Granted literature
- US11680585B2 Vacuum pump Public/Granted day:2023-06-20
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