Invention Publication
- Patent Title: INTEGRATED ENERGY HARVESTING SYSTEM
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Application No.: US17972910Application Date: 2022-10-25
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Publication No.: US20230148014A1Publication Date: 2023-05-11
- Inventor: Thomas Grille , Elmar Aschauer , Ulf Bartl , Christoph Kovatsch , Matic Krivec , Thomas Ostermann , Lukas Praster , Gerald Stocker
- Applicant: Infineon Technologies AG
- Applicant Address: DE Neubiberg
- Assignee: Infineon Technologies AG
- Current Assignee: Infineon Technologies AG
- Current Assignee Address: DE Neubiberg
- Priority: DE 2021128880.0 2021.11.05
- Main IPC: H02N2/18
- IPC: H02N2/18 ; H02N2/00

Abstract:
A MEMS component is described herein, which according to one exemplary embodiment includes: a semiconductor body; an insulation layer arranged on the semiconductor body; a boundary structure arranged on the insulation layer, the semiconductor body including an opening below the boundary structure; first and second structured electrodes arranged on the insulation layer; and a piezoelectric layer comprising a thermoplastic, and at least partially bounded by the boundary structure and arranged on the insulation layer and on the first and second electrodes.
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