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公开(公告)号：US20220381753A1
公开(公告)日：2022-12-01
申请号：US17658564
申请日：2022-04-08
发明人： Gerald Stocker , Elmar Aschauer , Ulf Bartl , Thomas Grille , Christoph Kovatsch , Thomas Krotscheck Ostermann
摘要： A fluid sensor includes a support structure having a top main surface region; a thermal emitter on the top main surface region of the support structure; a thermal radiation detector on the top main surface region of the support structure; and a waveguide structure having a first and a second waveguide section on the top main surface region of the support structure. The first waveguide section guides a first portion of the thermal radiation to the thermal radiation detector and the second waveguide section guides a second portion of the thermal radiation to the thermal radiation detector. The waveguide structure enables an interaction of an evanescence field of the guided first and/or second portion of the thermal radiation with a surrounding fluid.
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公开(公告)号：US20230148014A1
公开(公告)日：2023-05-11
申请号：US17972910
申请日：2022-10-25
发明人： Thomas Grille , Elmar Aschauer , Ulf Bartl , Christoph Kovatsch , Matic Krivec , Thomas Ostermann , Lukas Praster , Gerald Stocker
摘要： A MEMS component is described herein, which according to one exemplary embodiment includes: a semiconductor body; an insulation layer arranged on the semiconductor body; a boundary structure arranged on the insulation layer, the semiconductor body including an opening below the boundary structure; first and second structured electrodes arranged on the insulation layer; and a piezoelectric layer comprising a thermoplastic, and at least partially bounded by the boundary structure and arranged on the insulation layer and on the first and second electrodes.
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公开(公告)号：US20220381659A1
公开(公告)日：2022-12-01
申请号：US17658554
申请日：2022-04-08
发明人： Gerald Stocker , Elmar Aschauer , Ulf Bartl , Thomas Grille , Christoph Kovatsch , Thomas Krotscheck Ostermann
摘要： A fluid sensor for performing a reference measurement includes a support structure having a top main surface region; a thermal emitter on the top main surface region of the support structure; a first waveguide section and a first thermal radiation detector on the top main surface region of the support structure; and a cover structure on at least one part of the first waveguide section. The first waveguide section guides a first portion of the thermal radiation emitted by the thermal emitter to the first thermal radiation detector. The first thermal radiation detector detects the guided first portion of the thermal radiation for performing the reference measurement.
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公开(公告)号：US10715930B2
公开(公告)日：2020-07-14
申请号：US15961416
申请日：2018-04-24
发明人： Ulf Bartl , Alfons Dehe
摘要： According to an embodiment, an optical MEMS transducer includes a diffraction structure including alternating first reflective elements and openings arranged in a first plane, a reflection structure including second reflective elements and configured to deflect with respect to the diffraction structure, and an optical element configured to direct a first optical signal at the diffraction structure and the reflection structure and to receive a second optical signal from the diffraction structure and the reflection structure. The second reflective elements are arranged in the first plane when the reflection structure is at rest. Other embodiments include corresponding systems and apparatus, each configured to perform various embodiment methods.
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公开(公告)号：US20180249258A1
公开(公告)日：2018-08-30
申请号：US15961416
申请日：2018-04-24
发明人： Ulf Bartl , Alfons Dehe
CPC分类号： H04R23/008 , B81B3/0083 , B81B2201/0264 , B81B2201/047 , B81C1/00158 , G02B5/1814 , G02B27/4233 , H04R7/18 , H04R23/00 , H04R31/003 , H04R2201/003 , H04R2207/021 , H04R2307/207
摘要： According to an embodiment, an optical MEMS transducer includes a diffraction structure including alternating first reflective elements and openings arranged in a first plane, a reflection structure including second reflective elements and configured to deflect with respect to the diffraction structure, and an optical element configured to direct a first optical signal at the diffraction structure and the reflection structure and to receive a second optical signal from the diffraction structure and the reflection structure. The second reflective elements are arranged in the first plane when the reflection structure is at rest. Other embodiments include corresponding systems and apparatus, each configured to perform various embodiment methods.
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公开(公告)号：US20230296502A1
公开(公告)日：2023-09-21
申请号：US18166905
申请日：2023-02-09
发明人： Christoph Kovatsch , Elmar Aschauer , Ulf Bartl , Thomas Grille , Thomas Krotscheck Ostermann , Gerald Stocker
IPC分类号： G01N21/3504 , G01N23/20008 , H01L21/02
CPC分类号： G01N21/3504 , G01N23/20008 , H01L21/02002 , G01N2201/068
摘要： A monolithic fluid sensor system includes a sensor arrangement and a reference sensor arrangement that are monolithically arranged, wherein respective substrates or semiconductor substrates (wafers or semiconductor wafers) are bonded (fusion bonded or wafer bonded on wafer-level) to each other for providing the resulting monolithic fluid sensor system. The monolithic fluid sensor system particularly includes the sensor arrangement, a cover substrate, the reference sensor arrangement, and a reference cover substrate.
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公开(公告)号：US09973860B2
公开(公告)日：2018-05-15
申请号：US15090947
申请日：2016-04-05
发明人： Ulf Bartl , Alfons Dehe
CPC分类号： H04R23/008 , B81C1/00158 , G02B5/1814 , G02B27/4233 , H04R7/18 , H04R23/00 , H04R31/003 , H04R2201/003 , H04R2207/021 , H04R2307/207
摘要： According to an embodiment, an optical MEMS transducer includes a diffraction structure including alternating first reflective elements and openings arranged in a first plane, a reflection structure including second reflective elements and configured to deflect with respect to the diffraction structure, and an optical element configured to direct a first optical signal at the diffraction structure and the reflection structure and to receive a second optical signal from the diffraction structure and the reflection structure. The second reflective elements are arranged in the first plane when the reflection structure is at rest. Other embodiments include corresponding systems and apparatus, each configured to perform various embodiment methods.
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公开(公告)号：US20170289703A1
公开(公告)日：2017-10-05
申请号：US15090947
申请日：2016-04-05
发明人： Ulf Bartl , Alfons Dehe
CPC分类号： H04R23/008 , B81C1/00158 , G02B5/1814 , G02B27/4233 , H04R7/18 , H04R23/00 , H04R31/003 , H04R2201/003 , H04R2207/021 , H04R2307/207
摘要： According to an embodiment, an optical MEMS transducer includes a diffraction structure including alternating first reflective elements and openings arranged in a first plane, a reflection structure including second reflective elements and configured to deflect with respect to the diffraction structure, and an optical element configured to direct a first optical signal at the diffraction structure and the reflection structure and to receive a second optical signal from the diffraction structure and the reflection structure. The second reflective elements are arranged in the first plane when the reflection structure is at rest. Other embodiments include corresponding systems and apparatus, each configured to perform various embodiment methods.
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