Invention Publication
- Patent Title: PHOTOACID GENERATOR, PHOTORESIST COMPOSITION INCLUDING THE SAME, AND METHOD OF FORMING PATTERN USING THE PHOTOACID GENERATOR
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Application No.: US18047030Application Date: 2022-10-17
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Publication No.: US20230161245A1Publication Date: 2023-05-25
- Inventor: Minsang KIM , Haengdeog KOH , Hana KIM , Yoonhyun KWAK , Hyeran KIM , Eunkyung LEE , Aram JEON
- Applicant: Samsung Electronics Co., Ltd.
- Applicant Address: KR Suwon-si
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Suwon-si
- Priority: KR 20210164871 2021.11.25 KR 20220121121 2022.09.23
- Main IPC: G03F7/004
- IPC: G03F7/004 ; G03F7/039 ; C08F220/18

Abstract:
Provided are a photoacid generator, a photoresist composition including the same, and a method of forming a pattern by using the photoacid generator. The photoacid generator includes a copolymer of a monomer that generates an acid upon exposure to light and an acid-labile monomer of which solubility with respect to a developing solvent is changed by decomposition by an acid, wherein the copolymer is represented by Formula 1:
wherein, in Formula 1, x, y, L, A−, B+, R1, R2, and R3 are each the same as described in the detailed description.
wherein, in Formula 1, x, y, L, A−, B+, R1, R2, and R3 are each the same as described in the detailed description.
Information query
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