Invention Publication
- Patent Title: SYSTEM FOR SUPPLYING PHOTORESIST AND METHOD FOR MANAGING PHOTORESIST
-
Application No.: US18060629Application Date: 2022-12-01
-
Publication No.: US20230176482A1Publication Date: 2023-06-08
- Inventor: Hae Kyung KIM , Dae Sung Kim , Woo Sin Jung
- Applicant: SEMES CO., LTD.
- Applicant Address: KR Cheonan-si
- Assignee: SEMES CO., LTD.
- Current Assignee: SEMES CO., LTD.
- Current Assignee Address: KR Cheonan-si
- Priority: KR 20210171320 2021.12.02
- Main IPC: G03F7/16
- IPC: G03F7/16 ; B05C11/10

Abstract:
Provided is a system for supplying a photoresist. In an embodiment, a system for supplying a photoresist includes a pressure adjustment container provided to a supply line connected from a chemical liquid bottle to a first tank, and the pressure adjustment container includes a housing having a space formed therein, a separator separating the space of the housing into a first space and a second space, an inflow port making a photoresist flow in the first space, a discharge port discharging the photoresist from the first space, and a pressurized fluid inflow port supplying a pressurized fluid to the second space, and a volume of the first space varies depending on the supply of the pressurized fluid.
Information query
IPC分类: