Invention Publication
- Patent Title: NANOSHEET TRANSISTOR DEVICES AND RELATED FABRICATION METHODS
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Application No.: US17679465Application Date: 2022-02-24
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Publication No.: US20230178420A1Publication Date: 2023-06-08
- Inventor: Ming He , JaeHyun Park , Chihak Ahn , Mehdi Saremi , Rebecca Park , Harsono Simka , Daewon Ha
- Applicant: Samsung Electronics Co., Ltd.
- Applicant Address: KR Suwon-si
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Suwon-si
- Main IPC: H01L21/762
- IPC: H01L21/762 ; H01L29/423 ; H01L29/786 ; H01L29/06 ; H01L29/66

Abstract:
Methods of forming transistor devices are provided. A method of forming a transistor device includes providing a nanosheet stack that includes a plurality of nanosheets on a substrate. A sacrificial layer is between the nanosheet stack and the substrate. The method includes removing the sacrificial layer to form an opening between the nanosheet stack and the substrate. The method includes forming a gate spacer and an isolation region by forming an insulating material on the nanosheet stack and in the opening, respectively. Related transistor devices are also provided.
Information query
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