Invention Publication
- Patent Title: MEMS RESONATOR
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Application No.: US18072506Application Date: 2022-11-30
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Publication No.: US20230183060A1Publication Date: 2023-06-15
- Inventor: Charles I. Grosjean , Nicholas Miller , Paul M. Hagelin , Ginel C. Hill , Joseph C. Doll
- Applicant: SiTime Corporation
- Applicant Address: US CA Santa Clara
- Assignee: SiTime Corporation
- Current Assignee: SiTime Corporation
- Current Assignee Address: US CA Santa Clara
- The original application number of the division: US15676890 2017.08.14
- Main IPC: B81C1/00
- IPC: B81C1/00 ; H10N30/05 ; H10N39/00 ; H03H3/007 ; H03H9/10
Abstract:
Multiple degenerately-doped silicon layers are implemented within resonant structures to control multiple orders of temperature coefficients of frequency.
Public/Granted literature
- US11724934B2 MEMS resonator Public/Granted day:2023-08-15
Information query
