- 专利标题: LIQUID SUPPLYING UNIT AND LIQUID SUPPLYING METHOD
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申请号: US17702088申请日: 2022-03-23
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公开(公告)号: US20230311028A1公开(公告)日: 2023-10-05
- 发明人: Jung Suk GOH , Kuk Saeng KIM , Do-Youn LIM , Wan Hee JEONG
- 申请人: SEMES CO., LTD.
- 申请人地址: KR Cheonan-si
- 专利权人: SEMES CO., LTD.
- 当前专利权人: SEMES CO., LTD.
- 当前专利权人地址: KR Cheonan-si
- 主分类号: B01D21/28
- IPC分类号: B01D21/28 ; B01D21/00 ; B01D35/06 ; B01D21/34
摘要:
The present invention provides a liquid supplying unit, including: a nozzle; a liquid supply pipe configured to supply a treatment liquid to the nozzle; and an impurity removing unit installed in the liquid supply pipe to remove an impurity in the treatment liquid, in which the impurity removing unit includes: a measuring unit configured to measure a characteristic of the impurity in the treatment liquid and form impurity data; a vibrating unit configured to apply vibration to the treatment liquid; a capturing unit configured to adsorb the impurity in the treatment liquid to which the vibration is applied; and a control unit configured to control the measuring unit and the vibration unit, and when the impurity data exceeds a reference data range, the control unit operates the vibrating unit.
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