- 专利标题: GROUP III NITRIDE SUBSTRATE, METHOD OF MAKING, AND METHOD OF USE
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申请号: US18331719申请日: 2023-06-08
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公开(公告)号: US20230317444A1公开(公告)日: 2023-10-05
- 发明人: Wenkan JIANG , Mark P. D'EVELYN , Derrick S. KAMBER , Dirk EHRENTRAUT , Jonathan D. COOK , James WENGER
- 申请人: SLT Technologies, Inc.
- 申请人地址: US CA Los Angeles
- 专利权人: SLT Technologies, Inc.
- 当前专利权人: SLT Technologies, Inc.
- 当前专利权人地址: US CA Los Angeles
- 分案原申请号: US16882219 2020.05.22
- 主分类号: H01L21/02
- IPC分类号: H01L21/02 ; C30B7/10 ; C30B33/10 ; C30B7/00 ; C30B29/40
摘要:
Embodiments of the present disclosure include techniques related to techniques for processing materials for manufacture of group-III metal nitride and gallium based substrates. More specifically, embodiments of the disclosure include techniques for growing large area substrates using a combination of processing techniques. Merely by way of example, the disclosure can be applied to growing crystals of GaN, AlN, InN, InGaN, AlGaN, and AlInGaN, and others for manufacture of bulk or patterned substrates. Such bulk or patterned substrates can be used for a variety of applications including optoelectronic and electronic devices, lasers, light emitting diodes, solar cells, photo electrochemical water splitting and hydrogen generation, photodetectors, integrated circuits, and transistors, and others.
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