Invention Publication
- Patent Title: RETICLE CONTAINER HAVING MAGNETIC LATCHING
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Application No.: US18132227Application Date: 2023-04-07
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Publication No.: US20230333463A1Publication Date: 2023-10-19
- Inventor: Huaping Wang , Russ V. Raschke , Caleb Elwell , Matthew Reber , Brian Wiseman
- Applicant: ENTEGRIS, INC.
- Applicant Address: US MA Billerica
- Assignee: ENTEGRIS, INC.
- Current Assignee: ENTEGRIS, INC.
- Current Assignee Address: US MA Billerica
- Main IPC: G03F1/66
- IPC: G03F1/66

Abstract:
Reticle containers include a magnetic latch to close the container and clamp the reticle contained within. The magnetic latch includes at least one magnet and another ferromagnetic material, which can be either another magnet or a magnetically attractable material. At least one of the magnets and the other ferromagnetic material can be manipulated to secure or open the container. The manipulation can include at least one of sliding of a housing, rotation of a magnet, or application of an external magnetic field to change the attraction of the magnet and the other ferromagnetic material.
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