公开(公告)号：US20230333463A1

公开(公告)日：2023-10-19

申请号：US18132227

申请日：2023-04-07

Applicant: ENTEGRIS, INC.

Inventor： Huaping Wang ,  Russ V. Raschke ,  Caleb Elwell ,  Matthew Reber ,  Brian Wiseman

IPC: G03F1/66

CPC classification number: G03F1/66

Abstract: Reticle containers include a magnetic latch to close the container and clamp the reticle contained within. The magnetic latch includes at least one magnet and another ferromagnetic material, which can be either another magnet or a magnetically attractable material. At least one of the magnets and the other ferromagnetic material can be manipulated to secure or open the container. The manipulation can include at least one of sliding of a housing, rotation of a magnet, or application of an external magnetic field to change the attraction of the magnet and the other ferromagnetic material.

公开(公告)号：US12271110B2

公开(公告)日：2025-04-08

申请号：US17940517

申请日：2022-09-08

Applicant: ENTEGRIS, INC.

Inventor： Russ V. Raschke ,  Caleb Elwell ,  Matthew Reber

IPC: H01L21/673 ,  G03F1/66 ,  G03F7/00

Abstract: Reticle pods include interfacing surfaces to secure segments of the reticle pod to one another. At least one of the interfacing surfaces is a ramped surface, such that when the reticle pods are secured to one another, the reticle is clamped between reticle contacts provided on the segments of the reticle pod. When the reticle pod is assembled and contains a reticle, a purge gas flow passage can be formed in the reticle pod. The height of the reticle contacts and the thickness of the reticle can be such that the reticle pod segments are spaced apart from one another by a gap, with the gap providing the purge gas flow passage. The reticle pod can be a stocker pod for the transportation and storage of reticles.

公开(公告)号：US20240061326A1

公开(公告)日：2024-02-22

申请号：US18233180

申请日：2023-08-11

Applicant: ENTEGRIS, INC.

Inventor： Russ V. Raschke ,  Caleb Elwell ,  Brian Wiseman

IPC: G03F1/66 ,  C25D7/00 ,  C25D5/10

CPC classification number: G03F1/66 ,  C25D7/00 ,  C25D5/10

Abstract: Reticle containers include a cover and a baseplate having contact surfaces configured to contact one another when the reticle container is assembled. Relief areas are provided adjacent to at least one of the contact surfaces. The relief areas are such that plating provided on in those relief areas do not contact the other of the cover or the baseplate when the reticle container is assembled. The relief areas can include structures such as beveled regions, depressions, and radiused regions. The relief areas can optionally further serve as a robber during an electroplating process.

公开(公告)号：US20230075744A1

公开(公告)日：2023-03-09

申请号：US17940517

申请日：2022-09-08

Applicant: ENTEGRIS, INC.

Inventor： Russ V. Raschke ,  Caleb Elwell ,  Matthew Reber

IPC: G03F7/20

Abstract: Reticle pods include interfacing surfaces to secure segments of the reticle pod to one another. At least one of the interfacing surfaces is a ramped surface, such that when the reticle pods are secured to one another, the reticle is clamped between reticle contacts provided on the segments of the reticle pod. When the reticle pod is assembled and contains a reticle, a purge gas flow passage can be formed in the reticle pod. The height of the reticle contacts and the thickness of the reticle can be such that the reticle pod segments are spaced apart from one another by a gap, with the gap providing the purge gas flow passage. The reticle pod can be a stocker pod for the transportation and storage of reticles.