Invention Application
- Patent Title: THREE-DIMENSIONAL MEMORY DEVICE WITH SEPARATED CONTACT REGIONS AND METHODS FOR FORMING THE SAME
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Application No.: US17556298Application Date: 2021-12-20
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Publication No.: US20230044232A1Publication Date: 2023-02-09
- Inventor: James KAI , Yuki MIZUTANI , Hisakazu OTOI , Masaaki HIGASHITANI , Hiroyuki OAGAWA
- Applicant: SANDISK TECHNOLOGIES LLC
- Applicant Address: US TX Addison
- Assignee: SANDISK TECHNOLOGIES LLC
- Current Assignee: SANDISK TECHNOLOGIES LLC
- Current Assignee Address: US TX Addison
- Main IPC: G11C16/04
- IPC: G11C16/04 ; H01L27/11519 ; H01L27/11524 ; H01L27/11556 ; H01L27/11565 ; H01L27/1157 ; H01L27/11582 ; H01L23/48 ; G11C8/14

Abstract:
A memory die includes an alternating stack of insulating layers and electrically conductive layers through which memory opening fill structures vertically extend. The memory die includes at least three memory array regions interlaced with at least two contact regions, or at least three contact regions interlaced with at least two memory array regions in the same memory plane. A logic die including at least two word line driver regions can be bonded to the memory die. The interlacing of the contact regions and the memory array regions can reduce lateral offset of boundaries of the word line driver regions from boundaries of the contact regions.
Public/Granted literature
- US11996153B2 Three-dimensional memory device with separated contact regions and methods for forming the same Public/Granted day:2024-05-28
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