Invention Application
- Patent Title: FORMING N-TYPE AND P-TYPE HORIZONTAL GATE-ALL-AROUND DEVICES
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Application No.: US17472759Application Date: 2021-09-13
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Publication No.: US20230079751A1Publication Date: 2023-03-16
- Inventor: Ruilong Xie , Kangguo Cheng , JUNTAO LI , Carl Radens
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Main IPC: H01L27/092
- IPC: H01L27/092 ; H01L21/8238

Abstract:
An approach provides a semiconductor structure for a first device with a first plurality of channels with a larger horizontal dimension than a vertical dimension of the first plurality of channels a second device comprising a second plurality of channels with a smaller horizontal dimension than the vertical dimension of the second plurality of channels. The first plurality of channels and the second plurality of channels have a same channel width in embodiments of the present invention. The first device is an n-type horizontal gate-all-around device and the second device is a p-type horizontal gate-all-around device.
Public/Granted literature
- US12113067B2 Forming N-type and P-type horizontal gate-all-around devices Public/Granted day:2024-10-08
Information query
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