- 专利标题： STAIR STEP FRAME STRUCTURES IN PIEZOELECTRIC RESONATORS
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申请号： US17488891申请日： 2021-09-29
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公开(公告)号： US20230115689A1公开(公告)日： 2023-04-13
- 发明人: Steffen Paul Link , Ting-Ta Yen , Jeronimo Segovia-Fernandez
- 申请人： TEXAS INSTRUMENTS INCORPORATED
- 申请人地址： US TX Dallas
- 专利权人： TEXAS INSTRUMENTS INCORPORATED
- 当前专利权人： TEXAS INSTRUMENTS INCORPORATED
- 当前专利权人地址： US TX Dallas
- 主分类号： H03H9/02
- IPC分类号： H03H9/02 ; H03H9/17 ; H03H3/02
摘要：
A piezoelectric resonator includes a first conductive layer, and a piezoelectric layer affixed to a first side of the first conductive layer. The piezoelectric resonator also includes a stair step frame structure affixed to a first side of the piezoelectric layer, and a second conductive layer, affixed to the first side of the piezoelectric layer and covering the stair step frame structure.
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