Invention Application
- Patent Title: STAIR STEP FRAME STRUCTURES IN PIEZOELECTRIC RESONATORS
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Application No.: US17488891Application Date: 2021-09-29
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Publication No.: US20230115689A1Publication Date: 2023-04-13
- Inventor: Steffen Paul Link , Ting-Ta Yen , Jeronimo Segovia-Fernandez
- Applicant: TEXAS INSTRUMENTS INCORPORATED
- Applicant Address: US TX Dallas
- Assignee: TEXAS INSTRUMENTS INCORPORATED
- Current Assignee: TEXAS INSTRUMENTS INCORPORATED
- Current Assignee Address: US TX Dallas
- Main IPC: H03H9/02
- IPC: H03H9/02 ; H03H9/17 ; H03H3/02
Abstract:
A piezoelectric resonator includes a first conductive layer, and a piezoelectric layer affixed to a first side of the first conductive layer. The piezoelectric resonator also includes a stair step frame structure affixed to a first side of the piezoelectric layer, and a second conductive layer, affixed to the first side of the piezoelectric layer and covering the stair step frame structure.
Information query
