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公开(公告)号:US11264970B2
公开(公告)日:2022-03-01
申请号:US16290873
申请日:2019-03-02
Applicant: Texas Instruments Incorporated
Inventor: Jeronimo Segovia Fernandez , Peter Smeys , Ting-Ta Yen
Abstract: A MEMS resonator is operated at its parallel resonance frequency. An acoustic wave is propagated laterally away from a central region of the MEMS resonator through a piezoelectric layer of the MEMS resonator. The propagating acoustic wave is attenuated with concentric confiners that surround and are spaced apart from a perimeter of an electrode that forms the MEMS resonator.
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公开(公告)号:US20200373908A1
公开(公告)日:2020-11-26
申请号:US16422494
申请日:2019-05-24
Applicant: Texas Instruments Incorporated
Inventor: Ting-Ta Yen , Jeronimo Segovia Fernandez , Bichoy Bahr , Peter Smeys
Abstract: A micromechanical system (MEMS) resonator includes a base substrate. A piezoelectric layer has a first electrode attached to a first surface of the piezoelectric layer and a second electrode attached to a second surface of the piezoelectric layer opposite the first electrode. The first electrode is bounded by a perimeter edge. A patterned acoustic mirror is formed on a top surface of the first electrode opposite the piezoelectric layer, such that the patterned acoustic mirror covers a border strip of the top surface of the first electrode at the perimeter edge and does not cover an active portion of the top surface of the first electrode.
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公开(公告)号:US20200350889A1
公开(公告)日:2020-11-05
申请号:US16752956
申请日:2020-01-27
Applicant: TEXAS INSTRUMENTS INCORPORATED
Inventor: Peter Smeys , Ting-Ta Yen
Abstract: A method for manufacturing a Bulk Acoustic Wave (BAW) resonator module is provided. The method includes providing a substrate, defining a platform region on the surface of the substrate, disposing a BAW resonator device on the surface of the substrate within the platform region, and etching an isolation trench circumscribing at least 50% of a circumference of the platform region.
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公开(公告)号:US20200280300A1
公开(公告)日:2020-09-03
申请号:US16290873
申请日:2019-03-02
Applicant: Texas Instruments Incorporated
Inventor: Jeronimo Segovia Fernandez , Peter Smeys , Ting-Ta Yen
Abstract: A MEMS resonator is operated at its parallel resonance frequency. An acoustic wave is propagated laterally away from a central region of the MEMS resonator through a piezoelectric layer of the MEMS resonator. The propagating acoustic wave is attenuated with concentric confiners that surround and are spaced apart from a perimeter of an electrode that forms the MEMS resonator.
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公开(公告)号:US20200274485A1
公开(公告)日:2020-08-27
申请号:US16870582
申请日:2020-05-08
Applicant: Texas Instruments Incorporated
Inventor: Ben-yong Zhang , Seong-Ryong Ryu , Ali Kiaei , Ting-Ta Yen , Kai Yiu Tam
Abstract: A clock oscillator includes with a pullable BAW oscillator to generate an output signal with a target frequency. The BAW oscillator is based on a BAW resonator and voltage-controlled variable load capacitance, responsive to a capacitance control signal to provide a selectable load capacitance. An oscillator driver (such as a differential negative gm transconductance amplifier), is coupled to the BAW oscillator to provide an oscillation drive signal. The BAW oscillator is responsive to the oscillation drive signal to generate the output signal with a frequency based on the selectable load capacitance. The oscillator driver can include a bandpass filter network with a resonance frequency substantially at the target frequency.
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公开(公告)号:US20190036512A1
公开(公告)日:2019-01-31
申请号:US15660550
申请日:2017-07-26
Applicant: Texas Instruments Incorporated
Inventor: Ting-Ta Yen , Bichoy Bahr
IPC: H03H9/17
Abstract: Bulk acoustic wave resonators having a phononic crystal acoustic mirror are disclosed. An example integrated circuit package includes a bulk acoustic wave (BAW) resonator including a phononic crystal acoustic mirror (PCAM), the PCAM including a first arrangement of a first plurality of members in a first region, and a second arrangement of a second plurality of members in a second region, the first arrangement different from the second arrangement.
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公开(公告)号:US12132465B2
公开(公告)日:2024-10-29
申请号:US17537776
申请日:2021-11-30
Applicant: TEXAS INSTRUMENTS INCORPORATED
Inventor: Jeronimo Segovia-Fernandez , Bichoy Bahr , Ting-Ta Yen , Michael Henderson Perrott , Zachary Schaffer
CPC classification number: H03H9/175 , H03H9/02015 , H03H9/131
Abstract: A tunable bulk acoustic wave (BAW) resonator includes: a first electrode adapted to be coupled to an oscillator circuit; a second electrode adapted to be coupled to the oscillator circuit; and a piezoelectric layer between the first electrode and the second electrode; and a Bragg mirror. The Bragg mirror has: a metal layer; and a dielectric layer between the metal layer and either of the first electrode or the second electrode. The tunable BAW resonator also includes: a radio-frequency (RF) signal source having a first end and a second end, the first end coupled to the first electrode, and the second end coupled to the second electrode; and an amplifier circuit between either the first electrode or the second electrode and the Bragg mirror metal layer.
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公开(公告)号:US20240302326A1
公开(公告)日:2024-09-12
申请号:US18180666
申请日:2023-03-08
Applicant: TEXAS INSTRUMENTS INCORPORATED
Inventor: Bichoy Waguih Bahr , Ting-Ta Yen , Yogesh Kumar Ramadass
CPC classification number: G01N29/09 , G01N29/2437 , G01N29/2475 , G01N29/348 , G06F21/76 , G01N2291/018
Abstract: An integrated circuit (IC) includes a semiconductor substrate and a mold compound on the semiconductor substrate. The IC also includes an acoustic signal generator between the mold compound and the semiconductor substrate. The acoustic signal generator is configured to transmit an acoustic signal having a predetermined set of frequencies through at least one of the semiconductor substrate or the mold compound.
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公开(公告)号:US20230005881A1
公开(公告)日:2023-01-05
申请号:US17364769
申请日:2021-06-30
Applicant: Texas Instruments Incorporated
Inventor: Anindya Poddar , Mahmud Chowdhury , Hau Nguyen , Masamitsu Matsuura , Ting-Ta Yen
IPC: H01L23/00 , H01L23/498 , H01L23/31 , H01L21/56 , H01L25/065
Abstract: In a described example, an apparatus includes: a first semiconductor die with a component on a first surface; a second semiconductor die mounted on a package substrate and having a third surface facing away from the package substrate; a solder seal bonded to and extending from the first surface of the first semiconductor die flip chip mounted to the third surface of the second semiconductor die, the solder seal at least partially surrounding the stress sensitive component; a first solder joint formed between the solder seal and the third surface of the second semiconductor die; a second solder joint formed between solder at an end of the post connect and the third surface of the second semiconductor die; and a mold compound covering the second surface of the first semiconductor die, a portion of the second semiconductor die, and an outside periphery of the solder seal.
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公开(公告)号:US11063558B2
公开(公告)日:2021-07-13
申请号:US16114708
申请日:2018-08-28
Applicant: TEXAS INSTRUMENTS INCORPORATED
Inventor: Bichoy Bahr , Baher Haroun , Ting-Ta Yen , Ali Kiaei
Abstract: A system includes a tunable bulk acoustic wave (BAW) resonator device and a direct-current (DC) tuning controller coupled to the tunable BAW resonator device. The system also includes an oscillator circuit coupled to the tunable BAW resonator device. The DC tuning controller selectively adjusts a DC tuning signal applied to the tunable BAW resonator device to adjust a signal frequency generated by the oscillator circuit.
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