-
公开(公告)号:US20230115689A1
公开(公告)日:2023-04-13
申请号:US17488891
申请日:2021-09-29
Applicant: TEXAS INSTRUMENTS INCORPORATED
Inventor: Steffen Paul Link , Ting-Ta Yen , Jeronimo Segovia-Fernandez
Abstract: A piezoelectric resonator includes a first conductive layer, and a piezoelectric layer affixed to a first side of the first conductive layer. The piezoelectric resonator also includes a stair step frame structure affixed to a first side of the piezoelectric layer, and a second conductive layer, affixed to the first side of the piezoelectric layer and covering the stair step frame structure.