Invention Application
- Patent Title: DEPOSITION CHAMBER SYSTEM DIFFUSER WITH INCREASED POWER EFFICIENCY
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Application No.: US17505194Application Date: 2021-10-19
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Publication No.: US20230122134A1Publication Date: 2023-04-20
- Inventor: Changling Li , Lai Zhao , Gaku Furuta , Soo Young Choi , Robin L. Tiner , David Atchley , Ganesh Babu Chandrasekaran
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Main IPC: H01J37/32
- IPC: H01J37/32 ; B23B35/00 ; C23C16/455 ; C23C16/50

Abstract:
A diffuser includes a front-side gradient surface formed from a diffuser block, a back-side gradient surface formed from the diffuser block, and opening structures formed from the front-side gradient surface to the back-side gradient surface. Each opening structure includes a conical opening having a first end along the front-side gradient surface and a second end corresponding to an apex at a depth within the diffuser block, and a cylindrical opening formed from the depth to the back-side gradient surface. The opening structures are arranged in rows including a first set of rows and a second set of rows alternately positioned along a length of the diffuser block.
Public/Granted literature
- US12136538B2 Deposition chamber system diffuser with increased power efficiency Public/Granted day:2024-11-05
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