公开(公告)号：US12136538B2

公开(公告)日：2024-11-05

申请号：US17505194

申请日：2021-10-19

Applicant: Applied Materials, Inc.

Inventor： Changling Li ,  Lai Zhao ,  Gaku Furuta ,  Soo Young Choi ,  Robin L. Tiner ,  David Atchley ,  Ganesh Babu Chandrasekaran

IPC: H01J37/32 ,  B23B35/00 ,  C23C16/455 ,  C23C16/50

Abstract: A diffuser includes a front-side gradient surface formed from a diffuser block, a back-side gradient surface formed from the diffuser block, and opening structures formed from the front-side gradient surface to the back-side gradient surface. Each opening structure includes a conical opening having a first end along the front-side gradient surface and a second end corresponding to an apex at a depth within the diffuser block, and a cylindrical opening formed from the depth to the back-side gradient surface. The opening structures are arranged in rows including a first set of rows and a second set of rows alternately positioned along a length of the diffuser block.

公开(公告)号：US20230122134A1

公开(公告)日：2023-04-20

申请号：US17505194

申请日：2021-10-19

Applicant: Applied Materials, Inc.

Inventor： Changling Li ,  Lai Zhao ,  Gaku Furuta ,  Soo Young Choi ,  Robin L. Tiner ,  David Atchley ,  Ganesh Babu Chandrasekaran

IPC: H01J37/32 ,  B23B35/00 ,  C23C16/455 ,  C23C16/50

Abstract: A diffuser includes a front-side gradient surface formed from a diffuser block, a back-side gradient surface formed from the diffuser block, and opening structures formed from the front-side gradient surface to the back-side gradient surface. Each opening structure includes a conical opening having a first end along the front-side gradient surface and a second end corresponding to an apex at a depth within the diffuser block, and a cylindrical opening formed from the depth to the back-side gradient surface. The opening structures are arranged in rows including a first set of rows and a second set of rows alternately positioned along a length of the diffuser block.

公开(公告)号：US20250046578A1

公开(公告)日：2025-02-06

申请号：US18915480

申请日：2024-10-15

Applicant: Applied Materials, Inc.

Inventor： Changling Li ,  Lai Zhao ,  Gaku Furuta ,  Soo Young Choi ,  Robin L. Tiner ,  David Atchley ,  Ganesh Babu Chandrasekaran

IPC: H01J37/32 ,  B23B35/00 ,  C23C16/455 ,  C23C16/50

Abstract: A method can include removing material from a first side of a diffuser block to form a back-side gradient surface of a diffuser, wherein the back-side gradient surface is a first concave surface, after removing the material from the first side, removing material from a second side of the diffuser block to form a front-side gradient surface of the diffuser, wherein the front-side gradient surface is a second concave surface, and forming a plurality of opening structures through the front-side gradient surface to the back-side gradient surface.