Invention Application
- Patent Title: PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD USING THE SAME
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Application No.: US17744624Application Date: 2022-05-14
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Publication No.: US20230124857A1Publication Date: 2023-04-20
- Inventor: Yoon Seok CHOI , Soon Cheon Cho , Sang Jeong Lee , Hyun Woo Jo , Jong Won Park
- Applicant: SEMES CO., LTD.
- Applicant Address: KR Chungcheongnam-do
- Assignee: SEMES CO., LTD.
- Current Assignee: SEMES CO., LTD.
- Current Assignee Address: KR Chungcheongnam-do
- Priority: KR10-2021-0139978 20211020
- Main IPC: H01J37/32
- IPC: H01J37/32

Abstract:
A plasma processing apparatus is provided. The plasma processing apparatus includes a chamber having a processing space defined therein in which plasma is generated; and a plasma generation unit configured to excite gas in the processing space into a plasma state, wherein the plasma generation unit includes: a first power supply to supply power for generation of the plasma; a coil connected to the first power supply; a first shunt capacitor disposed between and connected to a first node of the coil and a ground; and a second shunt capacitor disposed between and connected to a second node other than the first node of the coil and the ground.
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