Invention Application
- Patent Title: PHOTODETECTORS WITH A DEEP TRENCH ISOLATION REGION THAT INCLUDES A BRAGG MIRROR
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Application No.: US17507213Application Date: 2021-10-21
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Publication No.: US20230131505A1Publication Date: 2023-04-27
- Inventor: Eric Linardy , Eng Huat Toh , Ping Zheng , Kiok Boone Elgin Quek
- Applicant: GLOBALFOUNDRIES Singapore Pte. Ltd.
- Applicant Address: SG Singapore
- Assignee: GLOBALFOUNDRIES Singapore Pte. Ltd.
- Current Assignee: GLOBALFOUNDRIES Singapore Pte. Ltd.
- Current Assignee Address: SG Singapore
- Main IPC: H01L27/146
- IPC: H01L27/146

Abstract:
Structures for a photodetector and methods of forming a structure for a photodetector. The structure includes a semiconductor layer having a p-n junction and a deep trench isolation region extending through the semiconductor layer. The deep trench isolation region includes first layers and second layers that alternate with the first layers to define a Bragg mirror. The first layers contain a first material having a first refractive index, and the second layers contain a second material having a second refractive index that is greater than the first refractive index.
Public/Granted literature
- US12266671B2 Photodetectors with a deep trench isolation region that includes a bragg mirror Public/Granted day:2025-04-01
Information query
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