Invention Application
- Patent Title: SYSTEM AND METHOD FOR MONITORING AND CONTROLLING MULTI-PHASE CONDITION OF REACTANTS IN MANUFACTURING PROCESS
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Application No.: US17853351Application Date: 2022-06-29
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Publication No.: US20230136503A1Publication Date: 2023-05-04
- Inventor: Feng-Sheng KAO , Tzu-Yu LIU , Cheng-Hsuan LIN , Chih-Ying YEN
- Applicant: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE
- Applicant Address: TW Hsinchu
- Assignee: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE
- Current Assignee: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE
- Current Assignee Address: TW Hsinchu
- Priority: TW110140949 20211103
- Main IPC: G01N21/75
- IPC: G01N21/75 ; G01N21/17

Abstract:
A method for monitoring and controlling multi-phase condition of reactant in manufacturing process is provided. The monitoring and controlling method includes the following steps. A plurality of clusters of monitoring images is captured corresponding to a plurality of process reaction time points in a plurality of observation regions. According to the clusters of the monitoring images, a plurality of image index features is extracted. According to the image index features, a plurality of phase modes corresponding to the observation regions is determined. According to the image index features, a cluster of generation characteristics of the reactant corresponding to the phase modes is determined. According to the cluster of generation characteristics, an adjustment of the manufacturing process is performed.
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