Invention Publication
- Patent Title: INTEGRATED CIRCUIT STRUCTURES HAVING RECESSED CHANNEL TRANSISTOR
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Application No.: US17855608Application Date: 2022-06-30
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Publication No.: US20240006412A1Publication Date: 2024-01-04
- Inventor: Abhishek Anil SHARMA , Tahir GHANI , Anand S. MURTHY , Rishabh MEHANDRU , Cory WEBER , Sagar SUTHRAM , Pushkar RANADE , Wilfred GOMES
- Applicant: Intel Corporation
- Applicant Address: US CA Santa Clara
- Assignee: Intel Corporation
- Current Assignee: Intel Corporation
- Current Assignee Address: US CA Santa Clara
- Main IPC: H01L27/088
- IPC: H01L27/088 ; H01L29/06 ; H01L29/78 ; H01L29/786

Abstract:
Structures having recessed channel transistors are described. In an example, an integrated circuit structure includes a channel structure having a recess extending partially there through. A gate dielectric layer is on a bottom and along sides of the recess, the gate dielectric layer laterally surrounded by the channel structure. A gate electrode is on and laterally surrounded by the gate dielectric layer. The gate electrode has an uppermost surface below and uppermost surface of the channel structure.
Information query
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