INTEGRATED CIRCUIT STRUCTURES HAVING RECESSED CHANNEL TRANSISTOR
Abstract:
Structures having recessed channel transistors are described. In an example, an integrated circuit structure includes a channel structure having a recess extending partially there through. A gate dielectric layer is on a bottom and along sides of the recess, the gate dielectric layer laterally surrounded by the channel structure. A gate electrode is on and laterally surrounded by the gate dielectric layer. The gate electrode has an uppermost surface below and uppermost surface of the channel structure.
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