Invention Publication
- Patent Title: PLASMA PROCESSING APPARATUS
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Application No.: US18336139Application Date: 2023-06-16
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Publication No.: US20240014008A1Publication Date: 2024-01-11
- Inventor: Naoaki TAKEDA , Shogo OKITA , Seiya NAGANO , Toshihiro WADA , Takahiro MIYAI
- Applicant: Panasonic Intellectual Property Management Co., Ltd.
- Applicant Address: JP Osaka
- Assignee: Panasonic Intellectual Property Management Co., Ltd.
- Current Assignee: Panasonic Intellectual Property Management Co., Ltd.
- Current Assignee Address: JP Osaka
- Priority: JP 22109153 2022.07.06
- Main IPC: H01J37/32
- IPC: H01J37/32

Abstract:
A disclosed plasma processing apparatus 10 includes: a chamber 11 having an opening 11a; a stage 12 disposed in the chamber 11, the stage for placing an object to be processed; a dielectric member 13 closing the opening 11a; and a plasma generation unit 16 disposed on the opposite side to the chamber 11 with reference to the dielectric member 13, and configured to, when applied with a high-frequency power, generate a plasma in the chamber 11. The plasma generation unit 16 has a first coil 17 including one or a plurality of first conductors 17a connected in parallel with each other, and a second coil 18 disposed so as to surround the first coil 17 and including a plurality of second conductors 18a connected in parallel with each other. The number of the second conductors 18a is greater than the number of the first conductors 17a.
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