Invention Publication
- Patent Title: CHEMICAL LIQUID SUPPLY UNIT AND SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME
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Application No.: US18124277Application Date: 2023-03-21
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Publication No.: US20240055276A1Publication Date: 2024-02-15
- Inventor: Seong Soo LEE , Dong Hee SON , Moon Sik CHOI
- Applicant: SEMES CO., LTD.
- Applicant Address: KR Cheonan-si
- Assignee: SEMES CO., LTD.
- Current Assignee: SEMES CO., LTD.
- Current Assignee Address: KR Cheonan-si
- Priority: KR 20220099137 2022.08.09
- Main IPC: H01L21/67
- IPC: H01L21/67 ; C02F1/68
Abstract:
A chemical liquid supply unit and a substrate processing apparatus including the same are proposed, which is capable of efficiently removing contaminants in a chemical liquid.
Information query
IPC分类:
