- 专利标题: FERROELECTRIC MEMORY DEVICE AND METHOD OF FORMING THE SAME
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申请号: US17886472申请日: 2022-08-12
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公开(公告)号: US20240055517A1公开(公告)日: 2024-02-15
- 发明人: Kuo-Chang Chiang , Yu-Chuan Shih , Chun-Chieh Lu , Po-Ting Lin , Hai-Ching Chen , Sai-Hooi Yeong , Yu-Ming Lin , Chung-Te Lin
- 申请人: Taiwan Semiconductor Manufacturing Company, Ltd.
- 申请人地址: TW Hsinchu
- 专利权人: Taiwan Semiconductor Manufacturing Company, Ltd.
- 当前专利权人: Taiwan Semiconductor Manufacturing Company, Ltd.
- 当前专利权人地址: TW Hsinchu
- 主分类号: H01L29/78
- IPC分类号: H01L29/78 ; H01L27/1159 ; H01L29/51 ; H01L29/66
摘要:
Provided are a ferroelectric memory device and a method of forming the same. The ferroelectric memory device includes: a gate electrode; a ferroelectric layer, disposed on the gate electrode; a channel layer, disposed on the ferroelectric layer; a pair of source/drain (S/D) electrodes, disposed on the channel layer; a first insertion layer, disposed between the gate electrode and the ferroelectric layer; and a second insertion layer, disposed between the ferroelectric layer and the channel layer, wherein the second insertion layer has a thickness less than a thickness of the first insertion layer.
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