Invention Publication
- Patent Title: COLD THERMAL CHEMICAL VAPOR DEPOSITION
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Application No.: US17768249Application Date: 2020-10-13
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Publication No.: US20240117495A1Publication Date: 2024-04-11
- Inventor: Geoffrey K. WHITE , Nicholas P. DESKEVICH , James B. MATTZELA , Gary A. BARONE , David A. SMITH , Pierre A. LECLAIR , Min YUAN , Jesse BISCHOF
- Applicant: SILCOTEK CORP.
- Applicant Address: US PA Bellefonte
- Assignee: SILCOTEK CORP.
- Current Assignee: SILCOTEK CORP.
- Current Assignee Address: US PA Bellefonte
- International Application: PCT/US2020/055322 2020.10.13
- Date entered country: 2022-04-12
- Main IPC: C23C16/52
- IPC: C23C16/52 ; C23C16/44 ; C23C16/455 ; C23C16/46

Abstract:
Cold thermal chemical vapor deposition coatings, articles, and processes are disclosed. Specifically, a cold thermal chemical vapor deposition process includes positioning an article, heating a precursor gas to at least a decomposition temperature of the precursor gas to produce a deposition gas, introducing the deposition gas to a coating vessel, and depositing a coating from the deposition gas onto the article within the coating vessel. The article remains at a temperature below the decomposition temperature throughout the introducing and depositing of the deposition gas. The coating on the article has a gradient formed by the depositing of the coating having no flow for a period of time. The coated article includes a thermally-sensitive substrate (the thermally-sensitive substrate capable of being modified by a temperature of 300 degrees Celsius) and a coating the thermally-sensitive substrate.
Information query
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