Invention Publication
- Patent Title: CONDUCTIVE LINE CONTACT REGIONS HAVING MULTIPLE MULTI-DIRECTION CONDUCTIVE LINES AND STAIRCASE CONDUCTIVE LINE CONTACT STRUCTURES FOR SEMICONDUCTOR DEVICES
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Application No.: US18403970Application Date: 2024-01-04
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Publication No.: US20240147693A1Publication Date: 2024-05-02
- Inventor: Byung Yoon Kim , Sheng Wei Yang , Si-Woo Lee , Mark Zaleski
- Applicant: Micron Technology, Inc.
- Applicant Address: US ID Boise
- Assignee: Micron Technology, Inc.
- Current Assignee: Micron Technology, Inc.
- Current Assignee Address: US ID Boise
- Main IPC: H10B12/00
- IPC: H10B12/00 ; G11C5/02 ; G11C5/10 ; H01L27/06

Abstract:
Systems, methods, and apparatus including conductive line contact regions having multiple multi-direction conductive lines and staircase conductive line contact structures for semiconductor devices. One memory device comprises arrays of vertically stacked memory cells, having multiple multi-direction conductive lines arrays of vertically stacked memory cells, including a vertical stack of layers formed from repeating iterations of a group of layers, the group of layers comprising: a first dielectric material layer, a semiconductor material layer, and a second dielectric material layer, the second dielectric material layer having a conductive line formed in a horizontal plane therein, and the vertical stack of layers having multiple multi-direction conductive lines in an interconnection region with a first portion of the interconnection region formed in an array region and a second portion formed in a conductive line contact region that is spaced from the array region.
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