Invention Publication
- Patent Title: LAMINATE AND MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE
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Application No.: US18284107Application Date: 2022-03-23
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Publication No.: US20240166556A1Publication Date: 2024-05-23
- Inventor: Risano NAKAJIMA , Yukari ARIMOTO , Mika KOSHINO , Hitoshi ARAKI , Masao TOMIKAWA , Takenori FUJIWARA , Kenta AOSHIMA
- Applicant: TORAY INDUSTRIES, INC.
- Applicant Address: JP Tokyo
- Assignee: TORAY INDUSTRIES, INC.
- Current Assignee: TORAY INDUSTRIES, INC.
- Current Assignee Address: JP Tokyo
- Priority: JP 21062609 2021.04.01
- International Application: PCT/JP2022/013453 2022.03.23
- Date entered country: 2023-09-26
- Main IPC: C03C17/34
- IPC: C03C17/34 ; H01L25/075

Abstract:
Provided is a laminate that can be implemented with a wide processing margin and without adhesive residue or damage to a semiconductor element in the transfer of the semiconductor element using laser light of various wavelengths. The laminate is obtained by laminating a substrate 1 having laser permeability, a resin film 1 and a resin film 2 in this order, wherein the light absorbance of the resin film 1 calculated for a film thickness of 1.0 μm at any wavelength of 200 nm to 1100 nm is 0.4-5.0, and the adhesive strength of the surface of the resin film 2 on the side opposite that of the resin film 1 side is 0.02-0.3 N/cm.
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