• Patent Title: REFLECTIVE MASK BLANK FOR EUV LITHOGRAPHY AND SUBSTRATE WITH CONDUCTIVE FILM
  • Application No.: US18439057
    Application Date: 2024-02-12
  • Publication No.: US20240184191A1
    Publication Date: 2024-06-06
  • Inventor: Yusuke ONOHiroshi HANEKAWAHirotomo KAWAHARA
  • Applicant: AGC INC.
  • Applicant Address: JP Tokyo
  • Assignee: AGC INC.
  • Current Assignee: AGC INC.
  • Current Assignee Address: JP Tokyo
  • Priority: JP 21157976 2021.09.28
  • Main IPC: G03F1/24
  • IPC: G03F1/24
REFLECTIVE MASK BLANK FOR EUV LITHOGRAPHY AND SUBSTRATE WITH CONDUCTIVE FILM
Abstract:
A reflective mask blank for EUV lithography, includes: a substrate; a conductive film; a reflective layer; and an absorption layer, the absorption layer absorbing the EUV light, wherein the conductive film has a refractive index nλ1000-1100 nm of 5.300 or less and has an extinction coefficient kλ1000-1100 nm of 5.200 or less, at a wavelength of 1000 nm to 1100 nm, the conductive film has a refractive index nλ600-700 nm of 4.300 or less and has an extinction coefficient kλ600-700 nm of 4.500 or less, at a wavelength of 600 nm to 700 nm, the conductive film has a refractive index nλ400-500 nm of 2.500 or more and has an extinction coefficient kλ400-500 nm of 0.440 or more, at a wavelength of 400 nm to 500 nm, and the conductive film has a film thickness t of 40 nm to 350 nm.
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