- 专利标题： CLEANING SYSTEM FOR POLISHING LIQUID DELIVERY ARM
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申请号： US18597077申请日： 2024-03-06
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公开(公告)号： US20240208006A1公开(公告)日： 2024-06-27
- 发明人: Roy C. Nangoy , Shantanu Rajiv Gadgil , Nathan Arron Davis , Allen L. D`Ambra , Michael J. Coughlin , Sumit Subhash Patankar
- 申请人： Applied Materials, Inc.
- 申请人地址： US CA Santa Clara
- 专利权人： Applied Materials, Inc.
- 当前专利权人： Applied Materials, Inc.
- 当前专利权人地址： US CA Santa Clara
- 主分类号： B24B57/02
- IPC分类号： B24B57/02 ; B24B37/34 ; B24B53/017
摘要：
A polishing liquid delivery arm cleaning tool includes a body configured to be removably secured to a polishing liquid delivery arm of a chemical mechanical polishing system, and an insert removably secured to the body. The insert has an arm-facing surface shaped to direct a cleaning fluid from the polishing liquid delivery arm back to an inner surface of an enclosure of the polishing liquid delivery arm.
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