Embodiments described herein may be related to apparatuses, processes, systems, and/or techniques for fabricating semiconductor packages that include DRAM using wide band gap materials, such as SiC or GaN to reduce transistor leakage. In addition, transistors may be fabricated adding one or more extra layers between a source and a drain of a transistor and the contact of the source of the drain to increase the effective electrical gate length of the transistor to further reduce leakage. In addition, for these transistors, a thickness of the body below the gate may be made narrow to improve gate control. Other embodiments may be described and/or claimed.