- 专利标题: SINGLE-PHOTON AVALANCHE DIODE INTEGRATED WITH QUENCHING RESISTOR AND MANUFACTURING METHOD THEREOF
-
申请号: US18578226申请日: 2022-12-13
-
公开(公告)号: US20240322061A1公开(公告)日: 2024-09-26
- 发明人: Zheng BIAN , Kui XIAO , Aifeng ZHAO , Jinjie HU , Tao YANG
- 申请人: CSMC TECHNOLOGIES FAB2 CO., LTD.
- 申请人地址: CN Jiangsu
- 专利权人: CSMC TECHNOLOGIES FAB2 CO., LTD.
- 当前专利权人: CSMC TECHNOLOGIES FAB2 CO., LTD.
- 当前专利权人地址: CN Wuxi, Jiangsu
- 优先权: CN 2111599112.X 2021.12.24
- 国际申请: PCT/CN2022/138575 2022.12.13
- 进入国家日期: 2024-01-10
- 主分类号: H01L31/107
- IPC分类号: H01L31/107 ; H01L27/144 ; H01L31/0216 ; H01L31/18
摘要:
The present disclosure relates to a single-photon avalanche diode integrated with a quenching resistor and a manufacturing method thereof. The method includes: obtaining a wafer; patterning and etching a front surface of the base to form a quenching resistor trench and an isolation trench, wherein a width of the isolation trench is greater than a width of the quenching resistor trench; forming an insulation layer on an inner surface of the quenching resistor trench; depositing polycrystalline silicon on the front surface of the base, where the polycrystalline silicon is filled into the quenching resistor trench and seals the quenching resistor trench while the polycrystalline silicon is filled into the isolation trench and does not seal the isolation trench; performing oxidation treatment on the polycrystalline silicon in the isolation trench; filling a light-shielding conductive material into the isolation trench.
信息查询
IPC分类: