Invention Publication
- Patent Title: EDGE RING ARRANGEMENT WITH MOVEABLE EDGE RINGS
-
Application No.: US18758576Application Date: 2024-06-28
-
Publication No.: US20240355667A1Publication Date: 2024-10-24
- Inventor: Haoquan YAN , Robert Griffith O'NEILL , Raphael CASAES , Jon MCCHESNEY , Alex PATERSON
- Applicant: LAM RESEARCH CORPORATION
- Applicant Address: US CA Fremont
- Assignee: LAM RESEARCH CORPORATION
- Current Assignee: LAM RESEARCH CORPORATION
- Current Assignee Address: US CA Fremont
- Main IPC: H01L21/687
- IPC: H01L21/687 ; H01J37/02 ; H01J37/20 ; H01J37/32 ; H01L21/67

Abstract:
An edge ring arrangement for a processing chamber includes a first ring configured to surround and overlap a radially outer edge of an upper plate of a pedestal arranged in the processing chamber, a second ring arranged below the first moveable ring, wherein a portion of the first ring overlaps the second ring, a first actuator configured to actuate a first pillar to selectively move the first ring to a raised position and a lowered position relative to the pedestal, and a second actuator configured to actuate a second pillar to selectively move the second ring to a raised position and a lowered position relative to the pedestal.
Information query
IPC分类: